Separation by Plasma Implantation of Oxygen (SPIMOX) Operational Phase Space

Separation by plasma implantation of oxygen (SPIMOX) has been suggested as an economic alternative for separation by implantation of oxygen (SIMOX) to form the silicon-oninsulator (SOI) structure. The chief advantage of SPIMOX is the high throughput and low-cost implanter. The operation regime of implantation for SPIMOX, which uses dc plasma immersion ion implantation (PIII) for the oxygen implantation, has been studied in the phase space of implantation time and chamber pressure during implantation. The phase space is developed for a definite implantation voltage and dose which are dependent on the dimensions of the SOI structure to be fabricated. The effects of dose, implantation voltage, and fractional ionization on the phase space have been discussed. SPIMOX can achieve high throughputs for thin-SOI structure fabrications using high fractional ionization plasmas. The phase space developed for SPIMOX implantation can also be used for other high-dose dc implantations with PIII which require a peaked implant profile below the surface.